Ambient Hydrocarbon Monitor Series

 

Ambient HC Monitor APHA-360 Features The APHA-360 uses a combination of the flame ionisation detection method and selective-combustion. This gives it the advantages of the single- detector method plus the ability to do continuous, zero-drift free measurements of THC, NMHC, and CH4.  (more)

 

EC Series

Exhaust Control System. Used to control the chamber pressure, a butterfly valve driven by a stepper motor. The stepper motor provides high speed response and high positioning accuracy. Chamber Pressure Control. Two Models are Available.  (more)

 

GA-360 Series

 

Trace Gas Monitor / Analyser GA-360E Outline The GA-360E/F360E Series is a line up of units that provide ultrahigh sensitive, highly accurate, continuous monitoring of trace amounts of impurities contained in gases (N2, O2, He, Ar, H2, and Air) used in the semiconductor manufacturing process.   (more)

 

LF/ LV Series

Liquid Mass Flow Meters / Controllers.Less than one drop measurement and control. Unique Cooling Method (patent pending). Applicable for Various Kinds of Liquid (including low boiling point liquids). Compact Design. High speed response. Small flow range (0.001~100sccm FS).  (more)

 

LK-P Series

Karman's Vortex System Liquid Flow Meter. For ultra clean technology.Flow rate monitoring of pure water in wet stations for Semiconductor and Liquid crystal display production. Suitable for the measurement and monitoring of various chemical liquid flows. All PFA construction. Output 4~20mA. No Particle Generation / No moving Parts. No dead Space. Free Mounting Orientation.  (more)

 

LSC-A100 Series

 

Compact Baking System. The LSC series is a liquid material gasification system for materials such as TEOS. The LSC-A100 is the latest in a series of units with a history of proven performance.  (more)

 

 

LU-A100 Series

TEOS Delivery Controller. CE/S2 Compliant. Compatible with LSC/VC system. Safety design with total control by using monitoring sensor. Easy operation by using user friendly man machine interface. Non stop continuous liquid delivery even when tank is being recharged.  (more)

 

Mass Flow Controller Power Supplies Series

 

Mass flow controller. 1, 2 or 4 channel power supplies. Modular control unit for Mass flow controllers. The power supplies comprise of a double display for each channel, to controlling MFCs working with voltage signals (0 - 5 Volts). The two displays give the possibility of monitoring simultaneously both reading and setpoint value.  (more)